With the continued need for shrinking pattern dimensions, semiconductor manufacturers continue to implement more complex patterning techniques, such as advanced multi-patterning, for the 10nm design ...

This publication serves as a high-level introduction to systems engineering for instrumentation and control at nuclear facilities. Systems engineering is a holistic, interdisciplinary and cooperative ...

Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...

Fundamentals of Industrial Process, Measurement, and Control (FG05) is a lecture-based course that provides an overview of industrial measurement and control. Technicians, engineers and managers learn ...

This course is an introduction to the foundations of nonlinear control theory, with an emphasis on feedback stabilization. As needed, topics from differential geometry and other mathematical ...

Author Patrick Bouwman explains how his book, Fundamentals of Process Control: Principles and Concepts, helps up-and-coming automation professionals build a solid foundation. What inspired you to ...